电子与封装
• 微电子制造与可靠性 •
田健，邓昊，王伯淳，陆洋
收稿日期:
修回日期:
出版日期:
发布日期:
通讯作者:
Received:
Revised:
Online:
Published:
摘要： 声学扫描显微镜检查作为塑封器件分层缺陷检测的主要手段，一直是塑封器件可靠性分析中一项重要的试验项目。如果对器件结构、声扫设备成像原理不清楚以及工作经验不足，容易对一些分层假象产生误判。结合作者工作中的实例，针对使用Sonoscan公司DS9500声扫设备时产生的分层假象，从器件结构、检测波形特点、声扫图像特征、以及验证方法等多个方面进行了综合分析，给出了几类常见分层假象的表现特点及识别方法。
关键词: 塑封器件, 声学扫描显微镜检查, 分层, 假象
Abstract: As the main method for the detection of delamination defects in PEM,SAM is always an important test item in the reliability analysis of PEM.If the working experience is not enough,it is easy to misjudge some delamination-illusions.Based on the examples in the author’s work,this paper comprehensively analyzes the delamination-illusion generated by Sonoscan DS9500 acoustic scanning equipment from the adpects of device structure,detection waveform characteristics, acoustic scanning image characteristics,and verification methods,and presents the performance characteristics and identification methods of sevsral delamination-illusion.
Key words: PEM, SAM, delamination, illusion
田健, 邓昊, 王伯淳, 陆洋. 声扫检查中分层假象的分析与识别[J]. 电子与封装, doi: 10.16257/j.cnki.1681-1070.2020. 1109.
0 / / 推荐
导出引用管理器 EndNote|Reference Manager|ProCite|BibTeX|RefWorks
链接本文: http://ep.org.cn/CN/10.16257/j.cnki.1681-1070.2020. 1109
